| Model | A | B |
|---|---|---|
| ST220FVD | VG100 | 680 |
| ST220FRD | ISO-R100 | 680 |
| ST220FCD | CF100 | 700 |
| ST350FVD | VG100 | 710 |
| ST350FRD | ISO-R100 | 694 |
| ST350FCD | CF100 | 710 |
| ST450FVD | VG150 | 670 |
| ST450FBD | ISO-B160 | 670 |
| ST450FCD | CF160 | 670 |
Vacuum Pumping Systems
ST SERIES (TG-F series + Dry Vacuum Pump)
Turbo molecular pumping system
Features
- A compact turbo molecular pumping system that integrates all the essential components required for high-vacuum pumping.
- Pumping down to high vacuum with a simple operation.
- Equipped with casters, allowing easy relocation to wherever and whenever it’s needed.
- Features the TG-F Series turbo molecular pump, known for its high tolerance to external shocks (can even be moved while operating).
* Optional accessories are available to match your needs.
Specifications
Specifications
| Model | ST220F*D | ST350F*D | ST450F*D | |
|---|---|---|---|---|
| Turbo Molecular Pump | TG220F | TG350F | TG450F | |
| Volume flow rate | N₂ (L/s) | 220 | 350 | 450 |
| N₂ (with protective screen) (L/s) | 210 | 330 | 430 | |
| Base pressure | (Pa) | <1×10⁻⁶ | <1×10⁻⁶ | <1×10⁻⁶ |
| (Torr) | <7.5×10⁻⁹ | <7.5×10⁻⁹ | <7.5×10⁻⁹ | |
| Inlet | VG100 / ISO-R100 / CF100 | VG100 / ISO-R100 / CF100 | VG150 / ISO-B160 / CF160 | |
| backing vacuum pump | Dry vacuum pump: DSP251 230 (200) L/min | Dry vacuum pump: DSP251 230 (200) L/min | Dry vacuum pump: DSP251 230 (200) L/min | |
| Cooling system | Forced air cooling | |||
| Power supply | Single-phase, AC100V/200V, 15A | |||
| Standard equipment configuration | ・Turbo molecular pump: TG220F~TG450F ・Backing pump: Dry vacuum pump (DSP251) ・Controller ・ST Controller ・Vacuum fittings: Flexible tube, elbow, clamp, etc. ・Automatic slow leak valve ・Aluminum frame (with casters) |
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※1:Equipped with an oil mist separator; the inlet filter is not included.
In addition to the standard configurations, the pumping system can be customized to meet your needs. For more details, please contact us.
Dimensions

* Reprinting prohibited without permission. Contents are subject to change without notice.
