Dry Vacuum Pumps
FR060D
Air-cooled Multi-stage Roots Vacuum Pumps
Features
- Enable operation from atmospheric pressure.
Volume flow rate is 800L/min at atmospheric pressure. - Enable handing water vapor.
Vapor tolerance is 500g/hr. - Reducing evacuation time.
Constant volume flow rate 800L/min over a wide pressure range to base pressure. - Air cooling.
Application
- Small laboratory system
- Load-lock and transfer chamber
- Analysis devices
- Vacuum chuck
- Accelerating exhaust
- Encapsulation, sealing
- Ion source, EB-gun
- Drying
- Sputter deposition
- Small furnace
- Backing vacuum pump for TMP
Specifications
Specifications
| Performance | ||
|---|---|---|
| Model | FR060D-2 (Single phase) / FR060D (Three phase) | |
| Inlet | KF40 | |
| Outlet | KF40 | |
| Volume flow rate (L/min) | Maximum | 1000 |
| Atmospheric open | 800 | |
| Base pressure (Pa) | 5.0 | |
| Base pressure (Pa) | Without gas ballast | 1.0 |
| With gas ballast | 2.0 | |
| Allowable ambient temperature (℃) | 5-40 | |
| Max vapor tolerance (g/hr) ※1 | 500 | |
| Lubrication oil quantity (mL) | 90 | |
| Approx. Weight (kg) | 75 | |
| Power/Utility | ||
|---|---|---|
| Phase | Single phase / Three phase | |
| Voltage (V) | 200-220 | |
| Tolerable voltage fluctuation ※2 | ±10％ | |
| Frequency (Hz) | 50/60 | |
| Power capability (VA) | 3000 | |
| Energy consumption at base pressure (W) | 1100 | |
| Max. energy consumption (W) | 1300 | |
| Electric current (A) | Single phase | 11.1 |
| Three phase | 6.5 | |
| Other specifications | |
|---|---|
| Cooling system | Air cooling |
*1 It is the maximum amount of the maximum processing when the gas ballast is “ON”.
*2 The ±10% voltage fluctuation is a tolerance value, not for steady-state voltage.
Dimensions
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
Reprinting prohibited without permission. Contents are subject to change without notice.
