Dry Vacuum Pumps
ER100D/ER100DC
Energy-saving Multi-stage Roots Vacuum Pumps
Features
- ER100D/ER100DC are among the best in the class in energy efficiency as well as lightness and compactness.
Energy consumption at ultimate pressure: 400W
Footprint: 0.11m2
Weight: 60kg - Two types are available for your needs.
ER100D: for light load, non-corrosive gas pumping
ER100DC: employs anti-corrosive materials for corrosive gas pumping
Application
- Clean exhaust
- Sputtering system
- Backing vacuum pump for TMP
- Load-lock and transfer chamber
- Small laboratory system
- Small furnace
- Analysis devices
- Ion source, EB-gun
Specifications
Specifications
| Performance | ||
|---|---|---|
| Model | ER100D/ER100DC | |
| Inlet | KF50 | |
| Outlet | KF25 | |
| Volume flow rate (L/min) | 1670 | |
| Base pressure (Pa) | 5.0 | |
| Approx. Weight (kg) | 60 | |
| Power/Utility | ||
|---|---|---|
| Phase | Three phase | |
| Voltage (V) | 200-220 | |
| Frequency (Hz) | 50/60 | |
| Power capability (VA) | 3200 | |
| Energy consumption at base pressure (W) | 400 | |
| Other specifications | |
|---|---|
| N₂ gas purge throughput (Pa・㎥/s) | 17～20 |
| Cooling water flow rate (L/min) | 1.5～3.0 |
| Cooling water temperature (℃) | Max. 30 |
[Corresponding gases]
Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.
Dimensions
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
Reprinting prohibited without permission. Contents are subject to change without notice.
