Vacuum technology ; Necessity in Various Industries
Vacuum technology is an essential technology in many diverse industries.
In automobile industry, vacuum equipment is continuously used in main coating processes for headlights, mirrors, window grasses, car cameras (CMOS) and sensors (MEMS and Optical Sensor). Electronics industry is also required to have vacuum process for manufacturing various machines and infrastructures related with IoT, in addition to semiconductors and flat display panels for TVs and smartphones. Medical sterilization equipment, accelerators for cancer and freeze-drying for medicines and instant foods also need vacuum technology.
The type of vacuum used can vary widely by industry. Examples include ultra-high vacuum, atmosphere to vacuum cycling, and displacing with a gas.
To create an optimal vacuum environment tailored to our customers' needs, Osaka Vacuum offers a wide range of vacuum products spanning from low to ultra-high vacuum.
Product Search
Semiconductor / Electronic components
Optical Industry
Automotive / Aviation
Material
Metal and Steel
Chemical
Energy
Medical / Pharmaceuticals
Laboratory instruments
Display
Aerospace / R & D
Machinery
Foods
Heavy electrical equipment
Transport
Search
Search
Search
Search
Search
Search
Search
Search
Search
High vacuum pump
Low and medium vacuum pump
High vacuum pump
Low and medium vacuum pump
Results
Results (no results)
Turbo Molecular Pumps
-
TGkine®-B SERIES
Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit
-
TGkine®MI-B SERIES
Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit
-
TGkine®-R SERIES
Magnetically Levitated Turbo Molecular Pump
-
TGkine®MI-R SERIES
Magnetically Levitated Turbo Molecular Pump with Temp. Control
-
TG-M SERIES
Magnetically Levitated Turbo Molecular Pump
-
TG-MI SERIES
Magnetically Levitated Turbo Molecular Pump with Temp. Control
-
TG-ML SERIES
Ultra Low Vibration Magnetically Levitated Turbo Molecular Pump
-
TG-MR SERIES
Radiation Hardened Magnetically Levitated Turbo Molecular Pump
-
TG-MU SERIES
Ultra High Vacuum Magnetically Levitated Turbo Molecular Pump
-
TG-F SERIES
Any Orientation Grease Lubricated Ball Bearing type Turbo Molecular Pump
-
TG SERIES
Oil Lubricated Ball Bearing type Turbo Molecular Pump
-
TS SERIES
Helical Groove Pump
Turbo Molecular Pumping Systems
Oil Diffusion Pumps
Booster Vacuum Pumps
Roots Vacuum Pumps
Dry Vacuum Pumps
Oil Lubricated Vacuum Pumps
Liquid ring vacuum pumps
Steam Ejector
Semiconductor / Electronic components
Semiconductor devices are manufactured by repeating processes such as film deposition, photoresist exposure, etching, and ion implantation on a wafer. Many of these processes are performed, and their results are inspected in a vacuum environment. Dry Vacuum Pumps are used for medium and low vacuum processes, and Turbo Molecular Pumps and cryo pumps are used for high vacuum processes.
Concrete examples
Wafers, Large-scale integrated circuits (LSI), Memory, Photomasks, Crystal silicon ingots, Data storage device, Sensors, Magnetic heads, Capacitors, Microelectromechanical systems (MEMS), Thermal heads, Crystal Oscillators, etc.
Optical Industry
PVD processes like evaporation and sputtering are used to deposit the functional films on the base material in the manufacturing of highly functional optical components, such as lenses and mirrors. These processes are also used for decorative purposes, giving an attractive appearance to goods containers, smartphone chassis, or car interior parts. Turbo Molecular Pumps and Oil Diffusion Pumps are used in these processes.
Concrete examples
Lenses, Mirrors, Optical filters, Optical devices, Optical fibers, Mobile phone housing, Lame fabric, Packaging materials, etc.
Automotive / Aviation
In the manufacturing of parts and components for cars or aircraft, where absolute reliability is required, a vacuum is used for leak inspections, heat treatment, and achieving consistent material quality. For instance, a helium leak detector is used for inspecting parts for leaks. This detector uses a split-flow turbo molecular pump with multiple inlet ports, each with a different compression ratios, to provide differential pumping in a single unit. We manufacture split-flow types to meet the specification of each leak detector.
Concrete examples
Brazing in automobile parts, Leak test, Vacuum plating, Vacuum forming, Carbon Fiber Reinforced Plastics (CFRP) for aircraft, Resin molding, Marine equipments, etc.
Material
High-performance architectural glass has a Low-E coating. The coating is deposited by sputtering, which uses turbo molecular pumps with high pumping speed and high throughput for heavy Ar gas. Our TGkine®-B series, TGkine®-R series, and TG-M series magnetically levitated turbomolecular pumps, as well as TG-F series grease-lubricated ball-bearing type turbo molecular pumps, are suitable for this process.
Concrete examples
Advanced materials (superalloys, carbon nanotubes, etc.), Pulp, Paper, Rubber, Glass, Fine ceramics, etc.
Metal and Steel
To produce high-quality steel, vacuum degassing removes dissolved gases from molten steel, vacuum carburizing furnaces diffuse carbon into the surface to improve wear resistance, and vacuum melting furnaces are used for refining high-performance alloys. These processes require pumping down to several tens of Pa in a matter of minutes. Additionally, the gases in these processes also contain a large amount of dust.
Concrete examples
Steel melting and degassing, Metallurgical processes of precious metals or refractory metals, Vacuum carburizing, Annealing, Quenching, Brazing, Electron beam welding, etc.
Chemical
Naphtha is fractionated from crude oil, and petrochemical plants manufacture various petrochemical products from it, such as plastics, synthetic rubber, synthetic fibers, paints, and surfactants for detergents. Vacuum is vital in multiple processes such as distillation, polycondensation, drying, degassing, and deodorization by offering beneficial characteristics under reduced pressure.
Concrete examples
Distilling and refining of petroleum, coal & natural gas, Drying plastic pellets, Distilling of polymer materials, Production of Synthetic fibers, etc.
Energy
In the manufacturing process of certain types of solar cells, light-absorbing layers, functional films, etc., are deposited in a vacuum. Our TGkine®-B and TGkine®-R magnetically levitated turbo molecular pump series satisfy high pumping speed and throughput required. In the manufacturing of lithium-ion batteries, materials are mixed, dried, and the electrolyte is filled in a vacuum. Dry Vacuum Pumps that are resistant to the chemicals used or pump systems that combine oil-sealed rotary vacuum pumps and mechanical booster pumps are used in these processes.
Concrete examples
Photovoltaic cells, Rechargeable batteries, Lithium-ion batteries, etc.
Medical / Pharmaceuticals
Vacuum distillation and freeze drying are used in pharmaceutical production to preserve sensitive ingredients. These processes use steam ejectors and liquid-ring vacuum pumps because they are ideal for pumping condensable gases, such as water. Hospitals use the VRD-M series direct-drive dual-stage oil-sealed rotary vane vacuum pumps to evacuate the sterilization chambers of medical device sterilizers, including high-pressure steam sterilizers, ethylene oxide gas sterilizers, and low-temperature hydrogen peroxide plasma sterilizers.
Concrete examples
Freeze drying of serum or antibiotics, Distilling and drying of pharmaceuticals, Electronic medical devices, etc.
Laboratory instruments
Mass spectrometers, electron microscopes, X-ray diffractometers, and other precision analyzers and measuring instruments often create a vacuum inside to eliminate the effect of air on the measurement. Mass spectrometers and He leak detectors based on them differentially pump the sample introduction ports and detectors. Split-flow turbo molecular pumps with multiple intake ports, each with different compression ratios, provide differential pumping in a single unit. We offer custom-made pumps to meet each system's requirements.
Concrete examples
Accelerator, Analysis equipment, Electron microscope, Mass spectrometer, Gas analyzer, Critical dimension scanning electron microscope (CD-SEM) , etc.
Display
Flat panel displays are manufactured by repeating processes such as sputtering, CVD, photoresist exposure, etching, and ion implantation on large glass or plastic substrates. Many processes require a vacuum. The sputtering process requires the pumps to have high pumping speed, throughput performance for heavy Ar gas, and tolerance to coating dust. Our TGkine®-B series, TGkine®-R series, and TG-M series magnetically levitated turbo molecular pumps and TG-F series grease-lubricated ball-bearing turbo molecular pumps are suitable for these applications.
Concrete examples
Liquid-crystal display (LCD) , Organic light-emitting diode (OLED) , Quantum dot light-emitting diode (QLED) , microLED, Touchscreen, etc.
Aerospace / R & D
Vacuum environments are used in various ways in large-scale scientific projects such as space exploration, ITER, and particle accelerators, as well as in research institutes and laboratories of various sizes. In space exploration, satellites are tested in an environment that simulates space using huge vacuum chambers. It requires large oil-sealed rotary vacuum pumps, machanical booster pumps, and turbo molecular pumps. We have a lineup for each type of vacuum pump.
Concrete examples
Space chamber, On-board equipment on satelite, Nuclear fusion reactor, Synchrotron radiation facility, Basic research (Universities, Government offices, Research institutes), etc.
Machinery
Electron beam welding, used for welding gears, etc., uses an electron beam accelerated and focused in a high vacuum to weld metals together. A small any-orientation turbomolecular pump pumps down the electron gun section to create a high vacuum. The welding chamber is also under a vacuum and is repeatedly pumped down from the atmosphere for each work. Short cycles require a high pumping speed. We line up the pump systems that combine the RD series mechanical booster pumps and the P series oil-sealed rotary piston pumps, which are durable against welding dust and can withstand repeated pumping down.
Concrete examples
Vacuum forming, Vacuum packing, Tool manufacturing, Surface hardening, Die machining, 3D printing, etc.
Foods
To extend the shelf life of meat, vegetables, and prepared foods, they are vacuum-packed or rapidly cooled in a vacuum. Many of our P series oil-sealed rotary piston vacuum pumps and W series liquid ring vacuum pumps operate in these processes. The P series pumps are rugged and resistant to repeated pump down from atmospheric pressure, and the W series pumps are suitable for pumping gases containing water vapor. Vacuum freeze-drying preserves heat-sensitive components while drying foods. Our P series oil-sealed rotary piston vacuum pumps, W series liquid ring vacuum pumps, and RD series mechanical booster pumps, which boost pumping speeds, are used in these applications.
Concrete examples
Freeze-drying of vegetables, fruits, coffee, etc., Vacuum distillation of alcoholic drinks, Vacuum cooling for food storage, Vacuum packing, etc.
Heavy electrical equipment
The insulation of motors, generators and transformers can be preserved for an extended period by drying the windings in a vacuum to remove moisture from the surface, then impregnating them with an insulation material in a vacuum. Insulation paper used in power cables is also dried in a vacuum to ensure long-term insulation performance. These vacuum drying processes require high pumping speeds and tolerance to water because the outgassing contain a lot of moisture.
Concrete examples
Transformers, Motors, Power cables, Vacuum circuit breaker, Vacuum tubes, etc.
Transport
A vacuum chuck is used to catch and transport objects that are not strong or rigid, such as large-sized plates or paper. Vacuum conveyors are used in food processing, pharmaceutical production, and plastic pellet movement. They convey powders and grains in a low-pressure airflow.
Concrete examples
Vacuum chucks, Vacuum tweezers, Waste transport, suction cup for paper transport (at printing, bookbinding, etc.)
Case Studies
-
MachineryVacuum Pumps for Metal Parts Coating
Learn more -
Automotive / AviationHigh Vacuum Pumping System for leak testing automotive parts
Learn more -
Aerospace / R & DA Vacuum Chamber to Realize the Man-made Shooting Star Project
Learn more -
Aerospace / R & D
Improvement of Pump Down Performance by Pd or Pd/Ti Coating
Learn more
