Downloads – 3D CAD, Field Network Device Profile

TGkine®-R SERIES (Magnetically Levitated Turbo Molecular Pumps)

• TGkine2200M-R Full 3D
• TGkine3800M-R Full 3D
• TGkine4200M-R Full 3D

• TGkine2204MBWB-R
• TGkine2204MVWB-R
• TGkine3304MVWB-R
• TGkine3404MVWB-R
• TGkine3804MBWB-R
• TGkine3804MVWB-R
• TGkine3805MBWB-R
• TGkine3805MVWB-R
• TGkine4204MVWB-R
• TGkine4205MVWB-R

TGkine®-B SERIES (Magnetically Levitated Turbo Molecular Pumps with Integrated Control Unit)

• TGkine1700M-B Full 3D
• TGkine2200M-B Full 3D
• TGkine3300M-B Full 3D
• TGkine3400M-B Full 3D
• TGkine3800M-B Full 3D
• TGkine4200M-B Full 3D

• TGkine2204MVWB-B
• TGkine2204MBWB-B
• TGkine2205MVWB-B
• TGkine2205MBWB-B
• TGkine3304MVWB-B
• TGkine3304MBWB-B
• TGkine3305MVWB-B
• TGkine3305MBWB-B
• TGkine3404MVWB-B
• TGkine3405MVWB-B
• TGkine4204MVWB-B
• TGkine4205MVWB-B

TG-M SERIES (Magnetically Levitated Turbo Molecular Pumps)

• TG390M Full 3D
• TG420M Full 3D
• TG900M Full 3D
• TG1300M Full 3D
• TG2400M Full 3D

• TG390MBAB
• TG390MBAC
• TG390MBWB
• TG390MBWC
• TG390MCAB
• TG390MCAC
• TG390MCWB
• TG390MCWC
• TG390MVAB
• TG390MVAC
• TG390MVWB
• TG390MVWC
• TG420MBAB
• TG420MBAC
• TG420MBWB
• TG420MBWC
• TG420MCAB
• TG420MCAC
• TG420MCWB
• TG420MCWC
• TG420MVAB
• TG420MVAC
• TG420MVWB
• TG420MVWC
• TG900MBAB
• TG900MBAC
• TG900MBWB
• TG900MBWC
• TG900MCAB
• TG900MCAC
• TG900MCWB
• TG900MCWC
• TG900MVAB
• TG900MVAC
• TG900MVWB
• TG900MVWC
• TG1300MBAB
• TG1300MBAC
• TG1300MBWB
• TG1300MBWC
• TG1300MCAB
• TG1300MCAC
• TG1300MCWB
• TG1300MCWC
• TG1300MVAB
• TG1300MVAC
• TG1300MVWB
• TG1300MVWC
• TG2400MBAB
• TG2400MBAC
• TG2400MBWB
• TG2400MBWC
• TG2400MVAB
• TG2400MVAC
• TG2400MVWB
• TG2400MVWC

TG-F SERIES (Grease-lubricated ball bearing type Turbo Molecular Pumps)

• TG50F Full 3D
• TG60F-20 Full 3D
• TG70F Full 3D
• TG220F Full 3D
• TG240F Full 3D
• TG350F Full 3D
• TG450F Full 3D
• TG800F Full 3D
• TG1100F Full 3D
• TG1400F Full 3D
• TG2400F Full 3D

• TG50FCAB
• TG50FCWB
• TG50FRAB
• TG50FRWB
• TG50FVAB
• TG50FVWB
• TG60FCAB-20
• TG60FCNB-20
• TG60FRAB-20
• TG60FRNB-20
• TG70FCAB
• TG70FCAB-20
• TG70FCNB
• TG70FCNB-20
• TG70FRAB
• TG70FRAB-20
• TG70FRNB
• TG70FRNB-20
• TG220FCAB
• TG220FCWB
• TG220FRAB
• TG220FRWB
• TG220FVAB
• TG220FVWB
• TG240FCAB
• TG240FRAB
• TG350FCAB
• TG350FCWB
• TG350FRAB
• TG350FRWB
• TG350FVAB
• TG350FVWB
• TG450FBAB
• TG450FBWB
• TG450FCAB
• TG450FCWB
• TG450FVAB
• TG450FVWB
• TG800FBAB
• TG800FBWB
• TG800FCAB
• TG800FCWB
• TG800FVAB
• TG800FVWB
• TG1100FBAB
• TG1100FBWB
• TG1100FCAB
• TG1100FCWB
• TG1100FVAB
• TG1100FVWB
• TG1400FBAB
• TG1400FBWB
• TG1400FCAB
• TG1400FCWB
• TG1400FVAB
• TG1400FVWB
• TG2400FBAB
• TG2400FBWB
• TG2400FBWB-40
• TG2400FVAB
• TG2400FVWB
• TG2400FVWB-40

TG SERIES (Oil-lubricated ball bearing type Turbo Molecular Pumps)

• TG203 Full 3D
• TG2810 Full 3D
• TG3210 Full 3D
• TG3410 Full 3D

• TG203CA
• TG203RW
• TG203VA
• TG1003BW
• TG2810EBW
• TG2810EVW
• TG3210EBW
• TG3210EVW
• TG3410EVW

Dry Vacuum Pumps

• Dry Pump Full 3D

• DSP251
• DSP501
• ER100D
• FR060D

TGkine®-B SERIES (Magnetically Levitated Turbo Molecular Pumps with Integrated Control Unit)

• GSDfile_rev2
• ESIfile

TGkine®-R SERIES (Magnetically Levitated Turbo Molecular Pumps)

• GSDfile_rev2
• ESIfile

TG-M7 SERIES (Magnetically Levitated Turbo Molecular Pumps)

• GSDfile_rev2
• ESIfile