Downloads

Downloads – 3D CAD, Field Network Device Profile

You can select and download electronic catalog (PDF), 2D-CAD data (DXF), 3D-CAD data (STEP / IGES), field network configuration file.
Membership registration is required to download.

3D-CAD(STEP/IGES)

Turbo Molecular Pumps

TGkine®-R SERIES (Magnetically Levitated Turbo Molecular Pumps)

TGkine®-B SERIES (Magnetically Levitated Turbo Molecular Pumps with Integrated Control Unit)

TG-M SERIES (Magnetically Levitated Turbo Molecular Pumps)

TG-F SERIES (Grease-lubricated ball bearing type Turbo Molecular Pumps)

TG SERIES (Oil-lubricated ball bearing type Turbo Molecular Pumps)

Dry Vacuum Pumps

Field Network Device Profile

Turbo Molecular Pumps

TGkine®-B SERIES (Magnetically Levitated Turbo Molecular Pumps with Integrated Control Unit)

TGkine®-R SERIES (Magnetically Levitated Turbo Molecular Pumps)

TG-M7 SERIES (Magnetically Levitated Turbo Molecular Pumps)

Downloads
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