SEMICON CHINA / FPD CHINA 2026 on March 25th – March 27th, 2026

Dates

• Date: March 25th – March 27th, 2026

Venue

• Venue: Shanghai New International Expo Centre, Pudong, Shanghai, China (SNIEC)
• Booth No.: N1 1162

OSAKA VACUUM will hold a booth at SEMICON CHINA / FPD CHINA 2026 from March 25th to 27th.

 

In this show, we will introduce turbo molecular pumps and dry vacuum pumps, which are essential for semiconductor manufacturing processes such as deposition, etching, lithography, ion implantation, packaging, and inspection.

 

We sincerely look forward to welcoming you all to our booth.

Product Description

• 

  TGkineMI-B SERIES

  Energy Efficient Heated Type Magnetically Levitated Turbo Molecular Pumps with Integrated Control Unit

• 

  TGkine2200M-B

  Magnetically Levitated Turbo Molecular Pump with Integrated Control Unit

• 

  FR060D

  Air-cooled Multi-stage Roots Vacuum Pumps

CONTACT

• “SEMICON CHINA / FPD CHINA 2026” Official Web Site: https://www.semiconchina.org/en
• Osaka Vacuum, Ltd.: https://www.osakavacuum.co.jp/en/contact/