Downloads – 2D CAD
You can select and download electronic catalog (PDF), 2D-CAD data (DXF), 3D-CAD data (STEP / IGES), field network configuration file.
Membership registration is required to download.
2D-CAD（DXF）
Turbo Molecular Pumps
TGkine®-B SERIES (Magnetically Levitated Turbo Molecular Pumps with Integrated Control Unit)
- TGkine1700M-B Full Download
- TGkine2200M-B Full Download
- TGkine3300M-B Full Download
- TGkine3400M-B Full Download
- TGkine3800M-B Full Download
- TGkine4200M-B Full Download
- TGkine1704MBWB-B_EN
- TGkine1704MBWC-B_EN
- TGkine1704MCWB-B_EN
- TGkine1704MVWB-B_EN
- TGkine2204MBWB-B_EN
- TGkine2204MBWC-B_EN
- TGkine2204MVWB-B_EN
- TGkine2204MVWC-B_EN
- TGkine2205MBWB-B_EN
- TGkine2205MBWC-B_EN
- TGkine2205MVWB-B_EN
- TGkine2205MVWC-B_EN
- TGkine3304MBWB-B_EN
- TGkine3304MBWC-B_EN
- TGkine3304MVWB-B_EN
- TGkine3304MVWC-B_EN
- TGkine3305MBWB-B_EN
- TGkine3305MBWC-B_EN
- TGkine3305MVWB-B_EN
- TGkine3305MVWC-B_EN
- TGkine3404MVWB-B_EN
- TGkine3404MVWC-B_EN
- TGkine3405MVWB-B_EN
- TGkine3405MVWC-B_EN
- TGkine3804MBWB-B_EN
- TGkine3804MBWC-B_EN
- TGkine3804MVWB-B_EN
- TGkine3804MVWC-B_EN
- TGkine3805MBWB-B_EN
- TGkine3805MBWC-B_EN
- TGkine3805MVWB-B_EN
- TGkine3805MVWC-B_EN
- TGkine4204MVWB-B_EN
- TGkine4204MVWC-B_EN
- TGkine4205MVWB-B_EN
- TGkine4205MVWC-B_EN
TGkine®-R SERIES (Magnetically Levitated Turbo Molecular Pumps)
- TGkine2200M-R Full Download
- TGkine3300M-R Full Download
- TGkine3400M-R Full Download
- TGkine3800M-R Full Download
- TGkine4200M-R Full Download
- TGkine2204MVWB-R_EN
- TGkine2204MBWB-R_EN
- TGkine2205MVWB-R_EN
- TGkine2205MBWB-R_EN
- TGkine3304MVWB-R_EN
- TGkine3304MBWB-R_EN
- TGkine3305MVWB-R_EN
- TGkine3305MBWB-R_EN
- TGkine3404MVWB-R_EN
- TGkine3405MVWB-R_EN
- TGkine3804MVWB-R_EN
- TGkine3804MBWB-R_EN
- TGkine3805MVWB-R_EN
- TGkine3805MBWB-R_EN
- TGkine4204MVWB-R_EN
- TGkine4205MVWB-R_EN
TG-M SERIES (Magnetically Levitated Turbo Molecular Pumps)
- TG390M Full Download
- TG420M Full Download
- TG900M Full Download
- TG1300M Full Download
- TG2400M Full Download
- TG390MBAB_EN
- TG390MBAC_EN
- TG390MBWB_EN
- TG390MBWC_EN
- TG390MCAB_EN
- TG390MCAC_EN
- TG390MCWB_EN
- TG390MCWC_EN
- TG390MVAB_EN
- TG390MVAC_EN
- TG390MVWB_EN
- TG390MVWC_EN
- TG420MBAB_EN
- TG420MBAC_EN
- TG420MBWB_EN
- TG420MBWC_EN
- TG420MCAB_EN
- TG420MCAC_EN
- TG420MCWB_EN
- TG420MCWC_EN
- TG420MVAB_EN
- TG420MVAC_EN
- TG420MVWB_EN
- TG420MVWC_EN
- TG900MBAB_EN
- TG900MBAC_EN
- TG900MBWB_EN
- TG900MBWC_EN
- TG900MCAB_EN
- TG900MCAC_EN
- TG900MCWB_EN
- TG900MCWC_EN
- TG900MVAB_EN
- TG900MVAC_EN
- TG900MVWB_EN
- TG900MVWC_EN
- TG1300MBAB_EN
- TG1300MBAC_EN
- TG1300MBWB_EN
- TG1300MBWC_EN
- TG1300MCAB_EN
- TG1300MCAC_EN
- TG1300MCWB_EN
- TG1300MCWC_EN
- TG1300MVAB_EN
- TG1300MVAC_EN
- TG1300MVWB_EN
- TG1300MVWC_EN
- TG2400MBAB_EN
- TG2400MBAC_EN
- TG2400MBWB_EN
- TG2400MBWC_EN
- TG2400MVAB_EN
- TG2400MVAC_EN
- TG2400MVWB_EN
- TG2400MVWC_EN
TG-M7 SERIES (Magnetically Levitated Turbo Molecular Pumps)
- TG397MBAB_EN
- TG397MBAC_EN
- TG397MBWB_EN
- TG397MBWC_EN
- TG397MCAB_EN
- TG397MCAC_EN
- TG397MCWB_EN
- TG397MCWC_EN
- TG397MVAB_EN
- TG397MVAC_EN
- TG397MVWB_EN
- TG397MVWC_EN
- TG427MBAB_EN
- TG427MBAC_EN
- TG427MBWB_EN
- TG427MBWC_EN
- TG427MCAB_EN
- TG427MCAC_EN
- TG427MCWB_EN
- TG427MCWC_EN
- TG427MVAB_EN
- TG427MVAC_EN
- TG427MVWB_EN
- TG427MVWC_EN
- TG907MBAB_EN
- TG907MBAC_EN
- TG907MBWB_EN
- TG907MBWC_EN
- TG907MCAB_EN
- TG907MCAC_EN
- TG907MCWB_EN
- TG907MCWC_EN
- TG907MVAB_EN
- TG907MVAC_EN
- TG907MVWB_EN
- TG907MVWC_EN
- TG1307MBAB_EN
- TG1307MBAC_EN
- TG1307MBWB_EN
- TG1307MBWC_EN
- TG1307MCAB_EN
- TG1307MCAC_EN
- TG1307MCWB_EN
- TG1307MCWC_EN
- TG1307MVAB_EN
- TG1307MVAC_EN
- TG1307MVWB_EN
- TG1307MVWC_EN
TG-F SERIES (Grease-lubricated ball bearing type Turbo Molecular Pumps)
- TG50F Full Download
- TG220F Full Download
- TG350F Full Download
- TG450F Full Download
- TG800F Full Download
- TG1100F Full Download
- TG1400F Full Download
- TG2400F Full Download
- TG60F Full Download
- TG70F Full Download
- TG240F Full Download
- TG50FCAB_EN
- TG50FCWB_EN
- TG50FRAB_EN
- TG50FRWB_EN
- TG50FVAB_EN
- TG50FVWB_EN
- TG60FCAB_EN
- TG60FCAB-20_EN
- TG60FCNB_EN
- TG60FCNB-20_EN
- TG60FRAB_EN
- TG60FRAB-20_EN
- TG60FRNB_EN
- TG60FRNB-20_EN
- TG70FCAB_EN
- TG70FCAB-20_EN
- TG70FCNB_EN
- TG70FCNB-20_EN
- TG70FRAB_EN
- TG70FRAB-20_EN
- TG70FRNB_EN
- TG70FRNB-20_EN
- TG220FCAB_EN
- TG220FCAB-70_EN
- TG220FCWB_EN
- TG220FCWB-40_EN
- TG220FRAB_EN
- TG220FRAB-81_EN
- TG220FRWB-40_EN
- TG220FRWB-80_EN
- TG220FVAB_EN
- TG220FVAB-60_EN
- TG220FVAB-72_EN
- TG220FVAB-96_EN
- TG220FVWB_EN
- TG220FVWB-14_EN
- TG220FVWB-90_EN
- TG220FVWB-91_EN
- TG220FVWB-94_EN
- TG240FCAB
- TG240FCAB-20
- TG240FRAB
- TG240FRAB-20
- TG350FCAB_EN
- TG350FCWB_EN
- TG350FRAB_EN
- TG350FRWB_EN
- TG350FVAB_EN
- TG350FVWB_EN
- TG450FBAB_EN
- TG450FBWB_EN
- TG450FCAB_EN
- TG450FCWB_EN
- TG450FVAB_EN
- TG450FVWB_EN
- TG800FBAB_EN
- TG800FBAB-60_EN
- TG800FBWB_EN
- TG800FCAB_EN
- TG800FCAB-60_EN
- TG800FCWB_EN
- TG800FVAB_EN
- TG800FVAB-60_EN
- TG800FVWB_EN
- TG1100FBAB_EN
- TG1100FBAB-60_EN
- TG1100FBWB_EN
- TG1100FCAB_EN
- TG1100FCAB-60_EN
- TG1100FCWB_EN
- TG1100FVAB_EN
- TG1100FVAB-60_EN
- TG1100FVWB_EN
- TG1400FBAB_EN
- TG1400FBWB_EN
- TG1400FCAB_EN
- TG1400FCWB_EN
- TG1400FVAB_EN
- TG1400FVWB_EN
- TG2400FBAB_EN
- TG2400FBWB_EN
- TG2400FBWB-40_EN
- TG2400FVAB_EN
- TG2400FVWB_EN
- TG2400FVWB-40_EN
TG SERIES (Oil-lubricated ball bearing type Turbo Molecular Pumps)
- TG203 Full Download
- TG553 Full Download
- TG1003 Full Download
- TG1303 Full Download
- TG1813 Full Download
- TG2810&TG2813 Full Download
- TG3210&TG3213 Full Download
- TG3410&TG3413 Full Download
- TG5000&TG5003 Full Download
- TG5500&TG5503 Full Download
- TG203CA_EN
- TG203CW_EN
- TG203RA_EN
- TG203RW_EN
- TG203VA_EN
- TG203VW_EN
- TG553BW_EN
- TG553CW_EN
- TG553VW_EN
- TG1003BW_EN
- TG1003CW_EN
- TG1003VW_EN
- TG1303BW_EN
- TG1303CW_EN
- TG1303VW_EN
- TG1813BW_EN
- TG1813VW_EN
- TG2810EBW_EN
- TG2810EVW_EN
- TG2813EBW_EN
- TG2813EVW_EN
- TG3210EBW_EN
- TG3210EVW_EN
- TG3213EBW_EN
- TG3213EVW_EN
- TG3410EVW_EN
- TG3413EVW_EN
- TG5000VW(BOTTOM)_EN
- TG5000VW(OUT)_EN
- TG5003VW(BOTTOM)_EN
- TG5003VW(OUT)_EN
- TG5500VW(BOTTOM)_EN
- TG5500VW(OUT)_EN
- TG5503VW(BOTTOM)_EN
- TG5503VW(OUT)_EN
