Oil Diffusion Pumps
DP SERIES
Oil Diffusion Pumps
Features
- Oil diffusion pumps attain high vacuum, and are used as the exhaust system for a wide variety of vacuum processes such as vacuum heat treatment, vacuum evaporation, electric beam welding, and sputtering.
- The lineup includes pumps with an volume flow rate of 10,000L/s or higher (without baffles).
- This is a highly reliable high vacuum pump with little pressure fluctuation even with bumping the pumping fluid.
- It uses no mechanical moving parts, resulting to be robust and long lifetime.
- Easy to disassemble design simplifies internal cleaning and inspection work.
Specifications
Specifications
| Model number※1 | DP2 | DP3 | DP4 | DP6 | DP8 | DP10 | |
|---|---|---|---|---|---|---|---|
| Volume flow rate (L/s) | No baffles | 125 | 280 | 380 | 810 | 1450 | 2070 |
| With standard baffle | 58 | 150 | 215 | 465 | 790 | 1200 | |
| Base pressure (Pa) | ～10⁻⁵ | ||||||
| Maximum forepressure (No load; Pa) | 20 | 15 | |||||
| Backstreaming rate (with standard baffle) (mg/㎠･min) | <10⁻⁴ | ||||||
| Standard baffle | Water-cooled louvers | ||||||
| Heater | Power supply | AC100V, 1φ | AC200V, 1φ | ||||
| Electrical power (kW) | 0.33 | 0.5 | 0.7 | 1 | 1.4 | 1.9 | |
| Oil capacity (L) | 0.05 | 0.1 | 0.15 | 0.34 | 0.5 | 0.82 | |
| Cooling water flow rate (Includes waterfor baffles)※2 (㎥/h) | 0.03 | 0.06 | 0.09 | 0.18 | 0.24 | 0.3 | |
| Weight (kg) | 4 | 6 | 8 | 20 | 30 | 41 | |
| Recommended backing pump※3 | VRD-4 | VRD-8 | VRD-24 | VRD-48 | P90 | P180/P222 | |
| Model number※1 | DP14 | DP18B | DP22B | DP24B | DP28B | DP36 | |
|---|---|---|---|---|---|---|---|
| Volume flow rate (L/s) | No baffles | 3600 | 8000 | 12800 | 16000 | 20000 | 40000 |
| With standard baffle | 2350 | 4600 | 6900 | 7900 | 9800 | 18000 | |
| Base pressure (Pa) | ～10⁻⁵ | ||||||
| Maximum forepressure (No load; Pa) | 15 | 59 | 65 | 65 | 67 | 27 | |
| Backstreaming rate (with standard baffle) (mg/㎠･min) | <10⁻⁴ | ||||||
| Standard baffle | Water-cooled louvers | ||||||
| Heater | Power supply | AC200V, 3φ | |||||
| Electrical power (kW) | 4.5 | 3.5 | 5.4 | 6.6 | 8 | 15 | |
| Oil capacity (L) | 1.6 | 2.2 | 3 | 3.5 | 4.5 | 9 | |
| Cooling water flow rate (Includes waterfor baffles) ※2 (㎥/h) | 0.42 | 0.3 | 0.42 | 0.6 | Upper: ≧0.18 Lower: ≧0.54 |
2.4 | |
| Weight (kg) | 120 | 110 | 167 | 210 | 250 | 1000 | |
| Recommended backing pump ※3 | Select according to specifications | ||||||
| Standard accessories |
|---|
| ・Hydraulic oil (Lion A) -- for 1 unit ・Gaskets for intake and exhaust (nitryl rubber) -- 1 set ・Oil level gauge (DP10 or higher) -- 1 set ・Oil supply and drain port (DP10 or higher) -- 1 set ・Bimetal (DP8 to DP22B) -- 1 set ・Thermostat (DP18B or higher) -- 1 set |
※1：Model numbers with a "B" at the end are energy-saving, space-saving models.
※2：Maximum cooling water temperature should be 25℃.
※3：The auxiliary vacuum pump must be selected according to the size of the target exhaust system and other specifications.
For details, contact our sales representative.
Dimensions
* Reprinting is prohibited without permission. Contents are subject to change without notice.
