DSP251
Compact Dry Screw Vacuum Pumps
Features
- Clean Vacuum
No oil back-streaming to the chamber. - Maintenance Free
No time gear means no lubricating oil to be maintained. Maintenance free due to no chip seal change or oil change is required. - Compact
Small-size, light-weight, and easy to carry. - Air-Cooled Type
No utility required other than the electricity. - High-Speed Pump Down
Large pumping speed at close to atmospheric pressure range by the bypass line. - Energy Efficient
Low power consumption design.
Application
- SEM
- Analytical Instruments
- Medical Devices
- Accelerator
- Gas Exhausting of Load-Lock / Transfer Chamber
- Ion Source
- Photolithography
- EB-Gun
- General Industry
- PVD
- R&D
Specifications
Specifications
| Performance | ||
|---|---|---|
| Model | DSP251 | |
| Inlet | KF25 | |
| Outlet | KF25 | |
| Volume flow rate (L/min) | w/o Gas Ballast | 230 |
| w Gas Ballast | 200 | |
| Base pressure (Pa) | w/o Gas Ballast | 0.5 |
| w Gas Ballast | 2 | |
| Approx. Weight (kg) | 16 | |
| Power/Utility | ||
|---|---|---|
| Phase | Single Phase | |
| Voltage (V) | AC100-230 (±10%) | |
| Power capability (VA) | 450 | |
| Power connector | Hirakawa Hutec CM11 | |
| Energy consumption at base pressure (W) | 240 | |
| Max. energy consumption (W) | 380 | |
| Standard accessories |
|---|
| ・Power Input Cable for AC100V: Grounded Plug in length 3m ・Connector for Controlling Signal: D-sub 15 pin male ・Operation Manual: English Version |
| Optional accessories |
|---|
| ・Suction Filter (*4): KF25 ・Power Input Cable for AC200V ・Silencer ・Anchor for Installation |
*1 If there is a concern that foreign objects may enter the unit, install a filter to the inlet or take other appropriate preventive measures.
*2 When pumping a gas with lower thermal conductivity than air, the rotor temperature of the pump may rise, resulting in damage caused by the rotor hitting the stator. The temperature rise also depends on the pumping conditions. Please contact our sales staff when using the pump to exhaust such gases.
*3 When pumping light gases such as helium or hydrogen, or when pumping large amounts of condensable gases, pump performance and operation may be limited. Please contact our sales staff in advance to exhaust such gases.
*4 After pumping, please introduce dry air or nitrogen gas through the ballast port to prevent condensation of water vapor and to improve the pumping performance of light gas.
Dimensions
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
Reprinting prohibited without permission. Contents are subject to change without notice.
