Turbo Molecular Pumps (Compound Molecular Pumps) Exhaust Theory

Turbo molecular pumps consist of moving and stator blades arranged on multiple levels. The figure below shows the relation between the angle and rotating direction of the blades. Gas molecules inbound from the high vacuum side enter the moving blades and try to exit in various directions. However, the angle and rotation of the blades cause the molecules to move toward the exhaust end and through the quickest path in the stator. Gas molecules that flow back from the rearmost stage through the stator hit the moving blade, sending them back to the exhaust end.

View details of exhaust theory >>

Typical Benefits of the Turbo Molecular Pump

• Provides an oil-free ultra-high vacuum.
• It features roughly the same exhaust rate for all gases in order to mechanically exhaust parentheses (dynamically exhaust) gas molecules.
• It can also exhaust noble and corrosive gases.
• It can continually exhaust large flow volumes of gas.
• Wide working pressure range (to 10^-10Pa).

Osaka Vacuum's Turbo Molecular Pumps Lineup

• 

  Any Orientation Type TG-F Series Lineup

  Uses grease lubricated ball bearings for a pump that is small, lightweight, and low cost. The shock resistant design enables the turbo molecular pump to be mounted on moving equipment or moving parts. The product lineup offers models from 50 L/s to 2400 L/s.
  
  

  TG50F	TG70F	TG220F	TG240F
  TG350F	TG450F	TG800F	TG1100F
  TG1400F	TG2400F	TG2410F

   

  
  
• 

  Magnetically Suspended Type TG-M Series Lineup

  The use of magnetically suspended bearings allows for a completely oil-free exhaust, any orientation installation, and longer cycles between maintenance. The product lineup offers models from 300 L/s to 3400 L/s.
  
  

  TG390M	TG420M	TG900M	TG1300M
  TG2400M	TG3260M	TG3460M

   

  
  
• 

  Magnetically Suspended Type
  with Integrated Control Unit
  kineTiG Series Lineup

  Integrated controller/power supply. No interconnect cable/cable duct nor rack-mount needed. Causes less strain to system design. Continues our TG-M series heritage. Optimized compound rotor design offers unparalleled performances.
  
  

  kineTiG2200M

  kineTiG3300M

   

  
  
• 

  Oil Lubricated Type TG Series Lineup

  Uses oil-lubricated ball bearings. Chemical-use models are available in every class from 200 L/s to 5500 L/s for use in applications for exhausting corrosive gases.
  
  

  TG203	TG553	TG1003	TG1303
  TG1810/1813	TG2813	TG3213	TG3413
  TG5000/5003	TG5500/5503

   

  
  

• TMP Pumping System

  

  ST Series

  Vacuum pumping system with a turbo molecular pump of TG-F model.
  Easy operating to producing high vacuum, and the mobility is good since it is on wheels.

   

  

  ST-Compact Series

  Vacuum pumping system with TG70F (TMP).
  This system is designed to be compact, the size of an A4 laptop.
  Its mobility makes it suitable for use as a simple vacuum pumping system for analytical facilities.