控制器・电源一体型 磁悬浮轴承型涡轮分子泵
TGkine1700M-B
TGkine2200M-B
TGkine3300M-B
TGkine3400M-B
TGkine3800M-B
TGkine4200M-B
磁悬浮轴承型涡轮分子泵
TGkine2200M-R
TGkine3300M-R
TGkine3400M-R
TGkine3800M-R
TGkine4200M-R
TG390M
TG420M
TG900M
TG1300M
TG2400M
TG397M
TG427M
TG907M
TG1307M
反应生成物对策型
TGkineMI-B系列
TGkineMI-R系列
TG-MI系列
