Products

TGkine3800M-R / TGkine4200M-R

  • TGkine3800M-R / TGkine4200M-R
■ Energy-saving design
■ A memory function in pump body is equpped to store operation data, setting parameter, abnormal history, and so on.
  ※All the data can be transferred even if the controller is replaced during an overhaul.
■ Various communication interfaces  EtherCAT compatible
■ International standard    CE/NRTL/SEMI-S2 certified
 

Application

■ Semiconductor manufacturing
■ FPD manufacturing
■ Solar cell manufacturing
■ Manufacturing of optical parts such as glass / lens
■ Film coating
■ Accelerator /Space simulator


Specifications

Model※1
TGkine3800M-R
TGkine4200M-R
Inlet flange
VG300
ISO-B320
VG350
Outlet flange※2
KF40 / KF50
Volume flow rate
N2 (L/s)
3600
4200
N2
(with protective screen) 
(L/s)
3400
4000
H2 (L/s)
2700
2700
Max. compression ratio
N2
>2×108
H2
2×103
Max. thoughput※3、※4
N2 (sccm)
2800
Ar (sccm)
1300
Startup time
(min)
≦12
Shutdown time
(min)
≦14
Base pressure※5
(Pa)
<5×10-7
(Torr)
<3.8×10-9
Maximum outlet port pressure※6
(Pa)
160
(Torr)
1.2
Recommended backing vacuum pump
(L/min)
≧2000
Mounting orientation
Vertical only
Weight
(kg)
72 / 74
70

 

※1:Please contact us for the specific model information.
※2:Specifications may vary depending upon the model.
※3:1Pa・L/s(25℃) = 0.543sccm(0℃、1 atm)
※4:Value attained when effective volume flow rate at outlet port as 5000L/min.
※5:Pressure attained after 48 hours of bake-out.
※6:Pressure allows continuous operation in N2 gas without damaging the pump.

Drawing of outside dimensions

Drawing of outside dimensions


  • Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model
TC0341M
Input voltage
 (ACV)
200~240 -15~+10%
Input phases
Single
Input frequency
(Hz)
50/60
Max. required power
(kVA)
1.0
Weight
(kg)
8
Communication interface (selectable)
Parallel I/O・RS232C・RS485・
Profibus・DeviceNet・EtherCAT
Standard accessories
・Input cable (5m):1 pc.
・Instruction manual
(controller, communication interface):
1 copy for each.