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TG3213
■Corrosive resistant type for corrosive gases.
■Durable structure for air inrush.
■Sturdy, resists external impacts.
■Serial communication
※RS232C Serial interface
■Conforms to recognized safety standard
NRTL / SEMI-S2 / CE
Application
■Semiconductor production
■Electronics gun exhaust, ionization source exhaust
■FPD manufacturing
■Surface treatment, surface modification
■Manufacture of various electronic components
■Lamp production, optical components production
■Accelerating device, radiation facility, nuclear fusion research
■Heat treatment
■Research and development
*TG-F, TG-M and TGkine series is available for clean processes.
Specifications
Inlet flange | VG300 ISO-B320 |
|
Volume flow rate | N2 (L/s) | 3200 |
N2 (with protective screen) (L/s) |
3000 | |
H2 (L/s) | 2500 | |
Max. compression ratio |
N2 | 1×108 |
H2 | 6×103 | |
Base pressure | VG・ISO-B (Pa) | <1×10-6 |
VG・ISO-B (Torr) | <7.5×10-9 | |
Max. throughput ※1 | N2 (sccm) | 543 |
Startup time | (min) | 10-15 |
Shutdown time | (min) | 25-30 |
Max. backing pressure | (Pa / Torr) | 270/2 |
Recommended backing vacuum pump |
(L/min) | 1500 |
Amount of lubrication oil required |
(mL) | 260 |
Position | Vertical(±10℃) | |
Weight | (kg) | 100 |
Comtroller | TC3213 |
*1 : When using a backing vacuum pump of 1000L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
Ⓐ | Ⓑ | Ⓒ | Ⓓ | Ⓔ |
VG300 | φ400 | 16 | 411.5 | 349.5 |
ISO-B320 | φ425 | 19 | 406.5 | 344.5 |
Performance curve
Controller
Controller model | TC3213 |
Input Voltage (ACV) | 200-230(±10%) |
Input Frequency (Hz) | 50/60 |
Input Phases | Single |
Input Power (VA) | 2200 |
Rated Output Frequency (Hz) | 360 |
Weight (kg) | 8.2 |
Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Ferrite core: 1 -Manual (Instruction, Serial communication instruction) : 1 copy |