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Products

TG3213

  • TG3213

■Corrosive resistant type for corrosive gases.

■Durable structure for air inrush.

■Sturdy, resists external impacts.

■Serial communication
　※RS232C Serial interface

■Conforms to recognized safety standard
　NRTL / SEMI-S2 / CE

Application

■Semiconductor production

■Electronics gun exhaust, ionization source exhaust

■FPD manufacturing

■Surface treatment, surface modification

■Manufacture of various electronic components

■Lamp production, optical components production

■Accelerating device, radiation facility, nuclear fusion research

■Heat treatment

■Research and development
　*TG-F, TG-M and TGkine series is available for clean processes.


Specifications

  • Inlet flange VG300
    ISO-B320
    Volume flow rate N2 (L/s) 3200
    N2
    (with protective
    screen) (L/s)    		 3000
    H2 (L/s) 2500
    Max. compression
    ratio    		 N2 1×108
    H2 6×103
    Base pressure  VG・ISO-B (Pa) <1×10-6
    VG・ISO-B (Torr) <7.5×10-9
    Max. throughput ※1 N2 (sccm) 543
    Startup time (min)  10-15
    Shutdown time (min) 25-30
    Max. backing pressure (Pa / Torr) 270/2
    Recommended backing
    vacuum pump    		 (L/min) 1500
    Amount of lubrication
    oil required    		 (mL) 260
    Position Vertical（±10℃）
    Weight (kg) 100
    Comtroller TC3213

    *1 : When using a backing vacuum pump of 1000L/min.

    [Ambient temperature for use]

    The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

    [Corresponding gases]

    Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


Ⓐ Ⓑ Ⓒ Ⓓ Ⓔ
VG300 φ400 16 411.5 349.5
ISO-B320 φ425 19 406.5 344.5
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model TC3213
Input Voltage (ACV) 200-230(±10%)
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 2200
Rated Output Frequency (Hz) 360
Weight (kg) 8.2
Standard accessories -Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Ferrite core: 1
-Manual (Instruction, Serial
communication instruction) : 1 copy