Products

TG1003

  • TG1003

■Corrosive resistant type for corrosive gases.

■Durable structure for air inrush.

■Sturdy, resists external impacts.

■Serial communication
 ※RS232C Serial interface

■Conforms to recognized safety standard
 NRTL / SEMI-S2 / CE

Application

■Semiconductor production

■Electronics gun exhaust, ionization source exhaust

■FPD manufacturing

■Surface treatment, surface modification

■Manufacture of various electronic components

■Lamp production, optical components production

■Accelerating device, radiation facility, nuclear fusion research

■Heat treatment

■Research and development
 *TG-F, TG-M and TGkine series is available for clean processes.


Specifications

Inlet flange VG150
CF160
ISO-B160
Volume flow rate N2 (L/s) 1000
N2
(with protective
screen) (L/s)
940
H2 (L/s) 1000
Max. compression
ratio
N2 1×108
H2 4×103
Base pressure  VG・ISO-B /
CF (Pa)
<1×10-6
< 1×10-7
VG・ISO-B /
CF (Torr)
<7.5×10-9
< 7.5×10-10
Max. throughput ※1 N2 (sccm) 2715
Startup time (min)  9-12
Shutdown time (min) 9-13
Max. backing pressure (Pa / Torr) 300/2.3
Recommended backing
vacuum pump
(L/min) 500
Amount of lubrication
oil required
(mL) 260
Position Vertical(±10℃)
Weight (kg) 50
Comtroller TC1003

*1 : When using a backing vacuum pump of 1000L/min.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


VG150 φ235 16 421 359
CF160 φ203 22 421 359
ISO-B160 φ225 16 421 359
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve

Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model TC1003
Input Voltage (ACV) 200-230(±10%)
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 1600
Rated Output Frequency (Hz) 400
Weight (kg) 8.2
Standard accessories -Input connector: 1
-Remote connector: 1
-Serial communication connector: 1
-Ferrite core: 1
-Manual (Instruction, Serial
communication instruction) : 1 copy