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TG1003
■Corrosive resistant type for corrosive gases.
■Durable structure for air inrush.
■Sturdy, resists external impacts.
■Serial communication
※RS232C Serial interface
■Conforms to recognized safety standard
NRTL / SEMI-S2 / CE
Application
■Semiconductor production
■Electronics gun exhaust, ionization source exhaust
■FPD manufacturing
■Surface treatment, surface modification
■Manufacture of various electronic components
■Lamp production, optical components production
■Accelerating device, radiation facility, nuclear fusion research
■Heat treatment
■Research and development
*TG-F, TG-M and TGkine series is available for clean processes.
Specifications
| Inlet flange | VG150 CF160 ISO-B160 |
|
| Volume flow rate | N2 (L/s) | 1000 |
| N2 (with protective screen) (L/s) |
940 | |
| H2 (L/s) | 1000 | |
| Max. compression ratio |
N2 | 1×108 |
| H2 | 4×103 | |
| Base pressure | VG・ISO-B / CF (Pa) |
<1×10-6 < 1×10-7 |
| VG・ISO-B / CF (Torr) |
<7.5×10-9 < 7.5×10-10 |
|
| Max. throughput ※1 | N2 (sccm) | 2715 |
| Startup time | (min) | 9-12 |
| Shutdown time | (min) | 9-13 |
| Max. backing pressure | (Pa / Torr) | 300/2.3 |
| Recommended backing vacuum pump |
(L/min) | 500 |
| Amount of lubrication oil required |
(mL) | 260 |
| Position | Vertical（±10℃） | |
| Weight | (kg) | 50 |
| Comtroller | TC1003 | |
*1 : When using a backing vacuum pump of 1000L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
| Ⓐ | Ⓑ | Ⓒ | Ⓓ | Ⓔ |
| VG150 | φ235 | 16 | 421 | 359 |
| CF160 | φ203 | 22 | 421 | 359 |
| ISO-B160 | φ225 | 16 | 421 | 359 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC1003 |
| Input Voltage (ACV) | 200-230(±10%) |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 1600 |
| Rated Output Frequency (Hz) | 400 |
| Weight (kg) | 8.2 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Ferrite core: 1 -Manual (Instruction, Serial communication instruction) : 1 copy |