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TG553
■Corrosive resistant type for corrosive gases.
■Durable structure for air inrush.
■Sturdy, resists external impacts.
■Serial communication
※RS232C Serial interface
■Conforms to recognized safety standard
NRTL / SEMI-S2 / CE
Application
■Semiconductor production
■Electronics gun exhaust, ionization source exhaust
■FPD manufacturing
■Surface treatment, surface modification
■Manufacture of various electronic components
■Lamp production, optical components production
■Accelerating device, radiation facility, nuclear fusion research
■Heat treatment
■Research and development
*TG-F, TG-M and TGkine series is available for clean processes.
Specifications
| Inlet flange | VG150 CF160 ISO-B160 |
|
| Volume flow rate | N2 (L/s) | 550 |
| N2 (with protective screen) (L/s) |
430 | |
| H2 (L/s) | 370 | |
| Max. compression ratio |
N2 | 1×108 |
| H2 | 3×103 | |
| Base pressure | VG・ISO-B / CF (Pa) |
<1×10-6 < 1×10-7 |
| VG・ISO-B / CF (Torr) |
<7.5×10-9 < 7.5×10-10 |
|
| Max. throughput ※1 | N2 (sccm) | 1500 |
| Startup time | (min) | 8-13 |
| Shutdown time | (min) | 8-11 |
| Max. backing pressure | (Pa / Torr) | 300/2.3 |
| Recommended backing vacuum pump |
(L/min) | 250 |
| Amount of lubrication oil required |
(mL) | 260 |
| Position | Vertical（±10℃） | |
| Weight | (kg) | 41 |
| Comtroller | TC553 | |
*1 : When using a backing vacuum pump of 500L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some types of gas to be evacuated may damage the pump. Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
| Ⓐ | Ⓑ | Ⓒ | Ⓓ | Ⓔ |
| VG150 | φ235 | 16 | 402 | 360 |
| CF160 | φ203 | 22 | 402 | 360 |
| ISO-B160 | φ225 | 16 | 402 | 360 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
Controller
| Controller model | TC553 |
| Input Voltage (ACV) | 200-230(±10%) |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 1200 |
| Rated Output Frequency (Hz) | 400 |
| Weight (kg) | 8.2 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Ferrite core: 1 -Manual (Instruction, Serial communication instruction) : 1 copy |