Products

TGkine3300M/TGkine3400M

  • TGkine3300M/TGkine3400M

- Integrated controller and power supply

- Energy saving

- Compact

- IP54 Standard

- Multiple interface options

- Conformed to International Standards: 

  CE / NRTL / SEMI-S2

Application

  • Solar cell manufacturing
  • Glass, optics coating
  • Film coating
  • Surface treatment, surface modification
  • LCD manufacturing
  • Semiconductor manufacturing
  • Accelerator, Space simulator

Specifications

Model
TGkine
3300M
TGkine
3300M-40
TGkine
3400M
Inlet fange
VG300
ISO-B320
VG300
ISO-B320
VG350
Outlet flange
KF40/KF50
Volume flow rate
N2 (L/s)
3300
N2 
(with protective screen;
L/s)
3100
H2 (L/s)
2700
Max. compression ratio
N2
>1×108
H2
3×103
Base pressure
VG・ISO-B (Pa)
<2×10-7
VG・ISO-B (Torr)
<7.5×10-9
Max. throughput
N2 (sccm)
2100
4000
2100
Startup time
(min)
≦11
Shutdown time
(min)
≦13
Max. backing pressure
(Pa/Torr)
170/1.28※1
Recommended backing 
vacuum pump
(L/min)
≧2000
Input voltage
 (V)
AC200-240V -15%+10%
phase
Single
frequency
(Hz)
50/60
current
(A)
Max. 5.3
power
(kVA)
Max. 0.9
Communication module (selectable)
Parallel I/O, RS232C, RS485, 
Profibus, DeviceNet
Protection rating
IP54
Position
Any orientation
Weight
VG・ISO-B (kg)
69
Controller
Integrated
Special specifications
(For details, contact our sales representative)
Chemical-use

*1 : Backing pressure that enables continuous pump operation under nitrogen gas.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-40℃. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.

 

Drawing of outside dimensions

Drawing of outside dimensions


Model Inlet flange A B
TGkine3300M/3300MI ISO-B320 φ425 20
VG300 φ400 16
TGkine3400M/3400MI VG350 φ450 20
  • Outlet flange KF50 is available.
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.