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Products
TG1300M
■Any orientation
■Compact size
■Energy-saving
■Quick starts and stops
■Maintenance call
■Vibration free
■Model coupling free
■Automatic calibration
■High throughput
■Rotational speed control
■Serial communication
■Safety standards certification for NRTL SEMI-S2 CE
Application
■ Semiconductor production
■ Electronics gun exhaust, ionization source exhaust
■ FPD manufacturing
■ Surface treatment, surface modification
■ Manufacture of various electronic components
■ Analysis, testing equipment
■ Lamp production, optical components production
■ Accelerating device, radiation facility, nuclear fusion research
■ Heat treatment
■ Research and development
Specifications
Inlet flange |
VG200 CF200 ISO-B200 |
|
Volume flow rate |
N2 (L/s) |
1300 |
N2 screen) (L/s) |
1230 |
|
H2 (L/s) |
1200 |
|
Max. compression ratio |
N2 |
1×108 |
H2 |
1.5×104 |
|
Base pressure |
VG・ISO-B/CF (Pa) |
<1×10-6 <1×10-7 |
VG・ISO-B/CF (Torr) |
<7.5×10-9 <7.5×10-10 |
|
Max. throughput※1 |
N2 (sccm) |
3000 |
Startup time |
(min) |
4~5 |
Shutdown time |
(min) |
4~5 |
Max. backing pressure |
(Pa / Torr) |
500 / 3.8 |
Recommended backing vacuum pump |
(L/min) |
≧250 |
Position |
Any orientation |
|
Weight (kg) VG, ISO-B/CF |
34 / 42 |
|
Controller |
TC010MA |
|
Special specifications *Contact our sales representative for |
-Chemical-use |
|
*1 : When using a backing vacuum pump of 1000L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
| Ⓐ | Ⓑ | Ⓒ | Ⓓ |
| VG200 | φ300 | 16 | 324 |
| CF200 | φ253 | 25 | 385 |
| ISO-B200 | φ285 | 16 | 359 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
Controller model |
TC010MA |
Input Voltage (ACV) |
200-240(±10%) |
Input Frequency (Hz) |
50/60 |
Input Phases |
Single |
Input Power (VA) |
1200 |
Rated Output Frequency (Hz) |
560 |
Weight (kg) |
11 |
Standard accessories |
-Input cable (5m): 1 -Remote connector: 1 -Manual (Instruction, Serial communication instruction): 1 copy |
TMP |
TG1300M |