Products

TG1300M

  • TG1300M

■Any orientation

■Compact size

■Energy-saving

■Quick starts and stops

■Maintenance call

■Vibration free

■Model coupling free

■Automatic calibration

■High throughput

■Rotational speed control

■Serial communication

■Safety standards certification for NRTL SEMI-S2 CE

Application

■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research
■ Heat treatment

■ Research and development


Specifications

Inlet flange
VG200
CF200
ISO-B200
Volume flow rate
N2 (L/s)
1300
N2
(with protective
screen) (L/s)
1230
H2 (L/s)
1200
Max. compression ratio
N2
1×108 
H2
1.5×104 
Base pressure
VG・ISO-B/CF (Pa)
<1×10-6
<1×10-7 
VG・ISO-B/CF (Torr)
<7.5×10-9
<7.5×10-10
Max. throughput※1
N2 (sccm)
3000
Startup time
(min) 
4~5
Shutdown time
(min)
4~5
Max. backing pressure
(Pa / Torr)
500 / 3.8 
Recommended backing 
vacuum pump
(L/min)
≧250
Position
Any orientation
Weight (kg)  VG, ISO-B/CF
34 / 42
Controller
TC010MA
Special specifications
*Contact our sales representative for 
more information.
-Chemical-use
-Thermal insulation TG-MI
-Ultra low vibration TG-ML
-Ultra high vacuum TG-MU
-Against radiation TG-MR

*1 : When using a backing vacuum pump of 1000L/min.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


VG200 φ300 16 324
CF200 φ253 25 385
ISO-B200 φ285 16 359
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

 

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model
TC010MA
Input Voltage (ACV)
200-240(±10%)
Input Frequency (Hz)
50/60
Input Phases
Single
Input Power (VA)
1200
Rated Output Frequency (Hz)
560
Weight (kg)
11
Standard accessories
-Input cable (5m): 1
-Remote connector: 1
-Manual (Instruction, Serial 
communication instruction): 1 copy
TMP
TG1300M