Products

TG420M

  • TG420M

■Any orientation

■Compact size

■Energy-saving

■Quick starts and stops

■Maintenance call

■Vibration free

■Model coupling free

■Automatic calibration

■High throughput

■Rotational speed control

■Serial communication

■Safety standards certification for NRTL SEMI-S2 CE

Application

■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research
■ Heat treatment

■ Research and development


Specifications

Inlet flange
VG150
CF160
ISO-B160
Volume flow rate
N2 (L/s)
400
N2
(with protective
screen) (L/s)
370
H2 (L/s)
300
Max. compression ratio
N2
1×108
H2
4.5×103
Base pressure
VG・ISO-B/CF (Pa)
<1×10-6
<1×10-7
VG・ISO-B/CF (Torr)
<7.5×10-9
<7.5×10-10
Max. throughput※1
N2 (sccm)
2000
Startup time
(min) 
2~3
Shutdown time
(min)
4~5
Max. backing pressure
(Pa / Torr)
400 / 3
Recommended backing 
vacuum pump
(L/min)
≧160
Position
Any orientation
Weight (kg)  VG・ISO-B/CF
14 / 17
Controller
TC010MA
Special specifications
*Contact our sales representative for 
more information.
-Chemical-use

-Thermal insulation
TG-MI

-Ultra low vibration
TG-ML

*1 : When using a backing vacuum pump of 320L/min.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


VG150 φ235 16 225
CF160 φ203 22 230
ISO-B160 φ225 16 230
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model
TC010MA
Input Voltage (ACV)
200-240(±10%)
Input Frequency (Hz)
50/60
Input Phases
Single
Input Power (VA)
700
Rated Output Frequency (Hz)
680
Weight (kg)
11
Standard accessories
-Input cable (5m): 1
-Remote connector: 1
-Manual (Instruction, Serial 
communication instruction): 1 copy
TMP
TG420M