Products

TG390M

  • TG390M

■Any orientation

■Compact size

■Energy-saving

■Quick starts and stops

■Maintenance call

■Vibration free

■Model coupling free

■Automatic calibration

■High throughput

■Rotational speed control

■Serial communication

■Safety standards certification for NRTL SEMI-S2 CE

Application

■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research
■ Heat treatment

■ Research and development


Specifications

Inlet flange
VG100
CF100
ISO-B100
Volume flow rate
N2 (L/s)
340
N2
(with protective
screen) (L/s)
320
H2 (L/s)
290
Max. compression ratio
N2
1×108 
H2
4.5×103 
Base pressure
VG・ISO-B/CF (Pa)
<1×10-6
<1×10-7 
VG・ISO-B/CF (Torr)
<7.5×10-9
<7.5×10-10
Max. throughput※1
N2 (sccm)
2000
Startup time
(min) 
2~3 
Shutdown time
(min)
4~5
Max. backing pressure
(Pa / Torr)
400 / 3 
Recommended backing 
vacuum pump
(L/min)
≧160 
Position
Any orientation 
Weight (kg)  VG・ISO-B/CF
14 / 17 
Controller
TC010MA
Special specifications
*Contact our sales representative for 
more information.
-Chemical-use

-Thermal insulation
TG-MI

-Ultra low vibration
TG-ML

*1 : When using a backing vacuum pump of 320L/min.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


VG100 φ185 15 263
CF100 φ152 21 269
ISO-B100 φ165 12 260
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model
TC010MA
Input Voltage (ACV)
200-240(±10%)
Input Frequency (Hz)
50/60
Input Phases
Single
Input Power (VA)
700
Rated Output Frequency (Hz)
680
Weight (kg)
11
Standard accessories
-Input cable (5m): 1
-Remote connector: 1
-Manual (Instruction, Serial 
communication instruction): 1 copy
TMP
TG390M