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ST Series (TG-F series + DSP251)

■High vacuum exhaust unit.

■Exhaust up to high vacuum with a simple operation.

■Easy to control with touch panel.

■Since it has casters, it can be easily moved to the desired place for use.

■Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance!
　This unit is portable while it is operating.

■Optional devices and apparatuses are available to match your needs.

Specifications

Model		ST220F*D	ST350F*D	ST450F*D
Turbo Molecular Pump		TG220F	TG350F	TG450F
Volume flow rate (N2; L/s)		220(210) ^※1	350(330) ^※1	450(430) ^※1
Base pressure	(Pa)	<1×10^-6
	(Torr)	<7.5×10^-9
Inlet flange		VG100/CF100/ISO-R100		VG150/CF160/ ISO-B160
Backing pump		Dry vacuum pump; DSP250 230 (200) L/min ^※2
Cooling system		Air cooling
Power supply		Single phase, AC100V/AC200V
Standard equipment configuration		TMP TMP Controller ST Controller Dry vacuum pump Automatic slow leak valve Vacuum valve Oil mist trap Aluminum trestle

※1 ( ) : With protective screen
※2 ( ) : Gas ballast opened

Drawing of outside dimensions

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