Products

TG800F

  • TG800F

■ Any orientation

■ Compact size

■ Energy-saving

■ Quick start up

■ Quick shut down with gas vent

■ Durable structure for air inrush 

■ Serial communication
  ※RS232C Serial interface

■ Certificated safety standard NRTL / SEMI-S2 / CE

Application

■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research

■ Heat treatment

■ Research and development

*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.


Specifications

Model
TG800F
TG800F*A*-60
TG800F*W*
Inlet flange  VG150/ISO-B160/CF160
Volume flow rate N2 (L/s) 820
N2
(with protective screen)
(L/s)
750
H2 (L/s) 650
Max. compression
ratio
N2 1×108
H2 1×104
Base pressure (Pa/Torr) <1×10-6/<7.5×10-9
Max.
throughput※1※2
(sccm) 330 860
Startup time※2 (min)  7-9 5.5-7
Shutdown time※2 (min)  27-32 12-15
Max. backing
pressure
(Pa/Torr) 330/2.5
Recommended
backing vacuum
pump
(L/min) ≧250
Position Any orientation
Weight VG・ISO-R/CF(kg)  27/26
Controller TC1104 TC1103※3

*1 : When using a backing vacuum pump of 500L/min.

*2 : Differs according to the power supply model.(standard:TC1104)

*3 : The air cooling fan must be replaced if air-cooled.(TG800F***-60)

[Ambient temperature for use]

The ambient temperature range to ensure you reach ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions


A B C D
VG150 φ235 12 312.5
CF160 φ203 22 327.5
ISO-B160 φ225 12 312.5
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model
TC1104
TC1103
Input Voltage
(ACV)
100-110 (±10%)
200-230 (±10%)
200-230 (±10%)
Input Frequency
(Hz)
50/60 50/60
Input Phases Single Single
Input Power
(VA)
610 810
Rated Output
Frequency (Hz)
560 560
Weight (kg) 2.7 8.2
Standard
accessories
-Input connector: 1
-Remote connector: 1
-Serial communication
connector: 1
-Manual (Instruction,
Serial communication
instruction): 1 copy
-Input connector: 1
-Remote connector: 1
-Serial communication
connector: 1
-Ferrite core: 1
-Manual(Instruction,
Serial communication
instruction): 1copy
TMP TG800F TG800F*A*-60
TG800F*W*