• TG70F

■Any orientation

■Compact size


■Quick start up

■Quick shut down with gas vent

■Durable structure for air inrush

■High compression ratio

■Built-in controller type

■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)


■ Semiconductor production

■ Electronics gun exhaust, ionization source exhaust

■ FPD manufacturing

■ Surface treatment, surface modification

■ Manufacture of various electronic components

■ Analysis, testing equipment

■ Lamp production, optical components production

■ Accelerating device, radiation facility, nuclear fusion research

■ Heat treatment

■ Research and development

*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.


Inlet flange ISO-R63/CF63
Volume flow rate N2 (L/s) 70/75
N2 (with protective screen) (L/s) 65/70
H2 (L/s) 40/45
Max. compression ratio N2 1×108
H2 1×105
Base pressure ISO-R(Pa/Torr) <5×10-7/<3.8×10-9
CF (Pa/Torr) <1×10-7/<7.5×10-10
Max. throughput※1 Air-cooling N2 (sccm) 10
Force Air-cooling N2 (sccm) 20
Startup time (min)  2-2.5
Max. backing pressure (Pa/Torr) 1200/9
Recommended backing
vacuum pump
(L/min) ≧25
Position Any orientation
Weight ISO-R/CF(kg)  3/5
Controller TC75 (on-board)※2
Input Voltage DC24V
Max. Input Power 120W

*1 : Allowable maximum flow rate at an auxiliary pump capacity of 25 L/min.
*2 : Optional separate type also available.
       (For details, notify our sales representative)

[Corresponding gases]
    Some service gases can deteriorate the lubrication grease and internal parts.
    Contact Osaka Vacuum for a list of applicable gas types.

Drawing of outside dimensions

Drawing of outside dimensions

CF63 φ114 18 170 76 141
ISO-R63 φ95 12 144.5 50.5 115.5
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.




Controller model TC76
Input Voltage (ACV) 100-230 (±10%)
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 160
Rated Output Frequency (Hz) 1500
Weight (kg) 2.4
Standard accessories -Input connector: 1
-Remote connector: 1
-Manual(Instruction): 1 copy
TMP TG70F-20