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TG70F
■Any orientation
■Compact size
■Energy-saving
■Quick start up
■Quick shut down with gas vent
■Durable structure for air inrush
■High compression ratio
■Built-in controller type
■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)
Application
■ Semiconductor production
■ Electronics gun exhaust, ionization source exhaust
■ FPD manufacturing
■ Surface treatment, surface modification
■ Manufacture of various electronic components
■ Analysis, testing equipment
■ Lamp production, optical components production
■ Accelerating device, radiation facility, nuclear fusion research
■ Heat treatment
■ Research and development
*If exhausting corrosive gases, choose from our chemical-use TG-M or TG Series.
Specifications
| Inlet flange | ISO-R63/CF63 | |
| Volume flow rate | N2 (L/s) | 70/75 |
| N2 (with protective screen) (L/s) | 65/70 | |
| H2 (L/s) | 40/45 | |
| Max. compression ratio | N2 | 1×108 |
| H2 | 1×105 | |
| Base pressure | ISO-R(Pa/Torr) | <5×10-7/<3.8×10-9 |
| CF (Pa/Torr) | <1×10-7/<7.5×10-10 | |
| Max. throughput※1 | Air-cooling N2 (sccm) | 10 |
| Force Air-cooling N2 (sccm) | 20 | |
| Startup time | (min) | 2-2.5 |
| Max. backing pressure | (Pa/Torr) | 1200/9 |
| Recommended backing vacuum pump |
(L/min) | ≧25 |
| Position | Any orientation | |
| Weight | ISO-R/CF(kg) | 3/5 |
| Controller | TC75 (on-board)※2 | |
| Input Voltage | DC24V | |
| Max. Input Power | 120W | |
*1 : Allowable maximum flow rate at an auxiliary pump capacity of 25 L/min.
*2 : Optional separate type also available.
(For details, notify our sales representative)
[Corresponding gases]
Some service gases can deteriorate the lubrication grease and internal parts.
Contact Osaka Vacuum for a list of applicable gas types.
Drawing of outside dimensions
| A | B | C | D | E | F |
| CF63 | φ114 | 18 | 170 | 76 | 141 |
| ISO-R63 | φ95 | 12 | 144.5 | 50.5 | 115.5 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC76 |
| Input Voltage (ACV) | 100-230 (±10%) |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 160 |
| Rated Output Frequency (Hz) | 1500 |
| Weight (kg) | 2.4 |
| Standard accessories | -Input connector: 1 -Remote connector: 1 -Manual(Instruction): 1 copy |
| TMP | TG70F-20 |