Products

TG60F

  • TG60F

■Any orientation

■Compact size

■Energy-saving

■Quick start up

■Quick shut down with gas vent

■Durable structure for air inrush

■High compression ratio

■Built-in controller type

■Certificated safety standard NRTL/SEMI-S2/CE (for TG60F-20)

Application

• Manufacturing of semiconductor, FPD, electronic parts, and other

• Analysis & examination device

• Research and development,… etc.


Specifications

Model
TG60F
TG60F-20
Inlet flange
ISO-R63、CF63、(KF40)※3
Volume flow rate
N2 (L/s)
60
N2 (with protective 
screen) (L/s)
55
H2 (L/s)
22
 
N2
2×107
H2
2×103
Base pressure 
VG・ISO-R /
CF (Pa)
<5×10-6
<1×10-6
VG・ISO-R /
CF (Torr)
<3.8×10-8
<7.5×10-9
Max. throughput※1
N2; Air-cooling 
(sccm)
10
N2; Force air-cooling 
(sccm)
20
Startup time
(min) 
1.5-2
Max. backing pressure
(Pa/Torr)
800 (6)
Recommended backing vacuum pump
(L/min)
≧25
Weight
ISO-R/CF(kg) 
3.4 / 5.4
Controller ※2
TC65
TC66
Input voltage(V)
DC24V
AC100-230V
(±10%)
Max. input power(W)
120W
160VA
  • *1 : In case of the backing vacuum pump of 25L/min.
    *2 : TC65 is a built-in controller, TC66 is rack controller.
    *3 : Please refer separately for the specifications of inlet flange KF40.
    [Ambient temperature for use]
    The ambient temperature range to assure reaching the ultimate pressure is 10~23℃. The permissible ambient temperature range is from 8 to 38℃.
    [Corresponding gases]
    Depending on the gas to be evacuated, some may damage the pump. Please contact us for detailes on corresponding gases.

Drawing of outside dimensions

Drawing of outside dimensions


A B C D E F
CF63 φ114 18 170 76 141
ISO-R63 φ95 12 144.5 50.5 115.5
  • Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
    Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.

Controller

Controller


Controller


Controller model TC66
Input Voltage (ACV) 100-230
Input Frequency (Hz) 50/60
Input Phases Single
Input Power (VA) 160
Rated Output Frequency (Hz) 1150
Weight (kg) 2.4
Standard accessories
  • -Input connector: 1
  • -Remote connector: 1
  • -Manual(Instruction): 1 copy
TMP  TG60F-20