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Product Search
TG60F
- Any orientation
- Compact size
- Energy-saving
- Quick start up
- Quick shut down with gas vent
- Durable structure for air inrush
- High compression ratio
- Built-in controller type
- Certificated safety standard NRTL/SEMI-S2/CE (for TG60F-20)
Application
- Manufacturing of semiconductor, FPD, electronic parts, and other
- Analysis & examination device
- Research and development,… etc.
Specifications
Model |
TG60F |
TG60F-20 |
|
Inlet flange |
ISO-R63、CF63、(KF40)※3 |
||
Volume flow rate |
N2 (L/s) |
60 |
|
N2 (with protective |
55 |
||
H2 (L/s) |
22 |
||
N2 |
2×107 |
||
H2 |
2×103 |
||
Base pressure |
VG・ISO-R / |
<5×10-6 |
|
VG・ISO-R / |
<3.8×10-8 |
||
Max. throughput※1 |
N2; Air-cooling (sccm) |
10 |
|
N2; Force air-cooling (sccm) |
20 |
||
Startup time |
(min) |
1.5-2 |
|
Max. backing pressure |
(Pa/Torr) |
800 （6） |
|
Recommended backing vacuum pump |
(L/min) |
≧25 |
|
Weight |
ISO-R/CF(kg) |
3.4 / 5.4 |
|
Controller ※2 |
TC65 |
TC66 |
|
Input voltage（V） |
DC24V |
AC100-230V |
|
Max. input power（W) |
120W |
160VA |
|
- *1 : In case of the backing vacuum pump of 25L/min.
*2 : TC65 is a built-in controller, TC66 is rack controller.
*3 : Please refer separately for the specifications of inlet flange KF40.
[Ambient temperature for use]
The ambient temperature range to assure reaching the ultimate pressure is 10～23℃. The permissible ambient temperature range is from 8 to 38℃.
[Corresponding gases]
Depending on the gas to be evacuated, some may damage the pump. Please contact us for detailes on corresponding gases.
Drawing of outside dimensions
| A | B | C | D | E | F |
| CF63 | φ114 | 18 | 170 | 76 | 141 |
| ISO-R63 | φ95 | 12 | 144.5 | 50.5 | 115.5 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
Performance curve
- Reprinting prohibited without permission. Contents are subject to change without notice.
Controller
| Controller model | TC66 |
| Input Voltage (ACV) | 100-230 |
| Input Frequency (Hz) | 50/60 |
| Input Phases | Single |
| Input Power (VA) | 160 |
| Rated Output Frequency (Hz) | 1150 |
| Weight (kg) | 2.4 |
| Standard accessories |
|
| TMP | TG60F-20 |