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Compact Dry Vacuum Pump DSP50 ⁄ DSP250 ⁄ DSP500
■ Excellent portability
Compact, light and rugged
■ Initial fast pump down
Good performance at high pressure range
■ Clean discharge
Clean and dry vacuum
■ No synchronous gears
Adopt electro-magnetic synchronization
■ Oil free
No oil needed for lubrication
Advantage for installation
■ Energy efficient
Good performance and no need for cooling-water
- SEM, lithography
- Medical devices
- Load-lock / transfer chamber
- Analysis devices
- Accelerator, ion source, EB-gun
- General vacuum industry
Volume flow rate
|Gas ballast opened||36||200||430|
|Gas ballast opened||200||2.0|
|At base pressure||230||240||270|
|Power supply||Voltage (V)||100-240||100-230|
|Cooling system||Air cooling|
Drawing of outside dimensions