Products

Compact Dry Vacuum Pump DSP50 ⁄ DSP250 ⁄ DSP500

  • Compact Dry Vacuum Pump DSP50 ⁄ DSP250 ⁄ DSP500
  • Compact Dry Vacuum Pump DSP50 ⁄ DSP250 ⁄ DSP500
  • Compact Dry Vacuum Pump DSP50 ⁄ DSP250 ⁄ DSP500

■ Excellent portability
  Compact, light and rugged
■ Initial fast pump down
  Good performance at high pressure range
■ Clean discharge
  Clean and dry vacuum
■ No synchronous gears
  Adopt electro-magnetic synchronization
■ Oil free
  No oil needed for lubrication
■ Air-cooling
  Advantage for installation
■ Energy efficient
  Good performance and no need for cooling-water

Application

- SEM, lithography
- Medical devices
- Load-lock / transfer chamber
- Analysis devices
- Accelerator, ion source, EB-gun
- General vacuum industry
- PVD
- R&D


Specifications

Model DSP50 NEW DSP250 DSP500

Volume flow rate

(L/min)

Maximum 50 230 500
Gas ballast opened 36 200 430

Base pressure

(Pa)

Maximum 20 0.5
Gas ballast opened 200 2.0
Connection Inlet KF16 KF25 KF40
Outlet Rc1 KF25
Power
consumption
(W)
At base pressure 230 240 270
Maximum 380 600
Power supply Voltage (V) 100-240 100-230
Frequency (Hz) 50/60
Phase Single phase

Tolerable voltage 

fluctuation

±10%
Cooling system Air cooling
Weight (kg) 9 15 20

Drawing of outside dimensions

Drawing of outside dimensions


  • Reprinting prohibited without permission. Contents are subject to change without notice.

Performance curve

Performance curve
  • Reprinting prohibited without permission. Contents are subject to change without notice.