Case Study

~Joint study with High Energy Accelerator Research Organization (KEK)~

Osaka Vacuum, Ltd. performed a joint study with High Energy Accelerator Research Organization (KEK) in which pump down performance has successfully been improved and a shorter production cycle time is expected as the outcome.

In order to improve the pump down performance, Osaka Vacuum has applied Pd (palladium) and Pd/Ti (palladium/titanium) coating on the inner surface of a test chamber and measured the pumping down time in collaboration with Dr. Kazuhiko Mase, associate professor of Institute of Materials Structure Science, KEK.

Test Chamber & Pump System

The measurement data showed that, compared to the pump down time without coating, the pump down with Pd coating took only 14% of the time and the pump down with Pd/Ti coating took only 19%. The base pressure was also an order of magnitude improved with Pd/Ti coating. It was also confirmed that the pumping down performance remained the same even after the coatings were exposed to the atmosphere repeatedly. Thanks to the innovative concept of the coatings, the pump down time of a vacuum system can be significantly reduced, which will also have positive effect on the production cycle time and furthermore, on productivity.

These coatings are expected to be useful for the applications such as accelerators, space chambers, electron microscopes, photoelectron spectrometers or any general vacuum systems.

Please contact our sales team for details.

* PCT patent pending

High Energy Accelerator Research Organization (KEK), NON-EVAPORABLE GETTER COATED COMPONENT AND CHAMBER, MANUFACTURING METHOD AND MANUFACTURING APPARATUS
WO/2018/097325

【Contact us】

https://www.osakavacuum.co.jp/en/contact/input.php