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Osaka Vacuum, Ltd.
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TMP Pumping System ST Series

Model
ST050F
ST220F
ST350F
TMP
TG50F
TG220F
TG350F
Volume flow rate (L/s)
 N2
51 (49)*1
220 (210)*1
350 (330)*1
Ultimate pressure
(Pa)
<3x10-6
<1x10-6
 
(Torr)
<2.3x10-8
<7.5x10-9
Inlet flange
 
 
VG65
ISO-R63
CF63
VG100
ISO-R100
CF100
Cooling system
Air cooling
Power supply
Single, AC100V
Standard equipment configuration
- TMP
- TMP Controller
- ST Controller
- Automatic slow leak valve
- Vacuum valve
- Oil-sealed rotary vacuum pumps
- Oil mist trap
- Aluminum trestle
Optional equipment
(For details, contact our sales representative)
  • *1 : Figures in parenthesis represent exhaust rate with protective steel mesh.
  • In addition to our standard specifications, we can also manufacture exhaust units designed to customer requirements. (For details, contact our sales representative)

ST SeriesDrawing of Outside dimension
Model A B C
ST050FV050 VG65 486 155
ST050FR050 ISO-R63 507 155
ST050FC050 CF63 521 155
ST220FV050 VG100 539 175
ST220FR050 ISO-R100 539 175
ST220FC050 CF100 559 175
ST350FV050 VG100 569 175
ST350FR050 ISO-R100 553 175
ST350FC050 CF100 569 175


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