New
Air-cooled Dry Vacuum Pump FR060D

  • Features

  • -Enable operation from atmospheric pressure.
  • -Enable hangding water vapor.
  • -Reducing evacuation time.
  • -Air cooling.

  • Applications

  • -Small laboratory system.
  • -Load-lock and transfer chamber.
  • -Analysis devices.
  • -Vacuum chuck.
  • -Accelerating exhaust.
  • -Encapsulation, sealing.
  • -Ionsource, EB-gun.
  • -Drying.
  • -Sputter deposition.
  • -Small furnace.
  • -Backing vacuum pump for TMP.
FR060D

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New
Magnetically Suspended Compound Molecular Pump
with Integrated Control Unit kineTiG3300M

  • Features

  • -Integrated controller and power supply on pump.
  • -No interconnect cable/cable duct nor rack-mount needed.
  • -Well balanced performance for a wide range of vacuum processes.
  • -Multiple interface options.
  • -IP54 Standard.
  • -Energy-saving.
  • -Following features of the TG-M series.

  • Applications

  • -Solar cell manufacturing.
  • -Glass, optics coating.
  • -Film coating.
  • -Surface treatment, suface modification.
  • -LCD manufacturing.
  • -Semiconductor manufacturing.
  • -Accelerator, Space simulator.
kineTiG3300M

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