New
Magnetically Suspended Turbo Molecular Pump TG397M⁄TG427M

tg397m tg427m
  • Features

  • < New Features >
  • - Enable to maintain setting parameters and operating data
  • - Four serial communication types, RS232C, RS485, Profibus, and DeviceNet, are selectable
  • - Energy saving
  • - Adapting the latest safety standard UL/IEC 61010-1 3rd edition.
  • Applications

  • - Semiconductor production
  • - Electronics gun exhaust, ionization source exhaust
  • - FPD manufacturing
  • -Surface treatment, surface modification
  • - Manufacture of various electronic components
  • - Analysis, testing equipment
  • - Lamp production, optical components production
  • - Heat treatment
  • - Research and development

View the details of TG397M >>
View the details of TG427M >>