New
Magnetically Suspended Turbo Molecular Pump TG907M⁄TG1307M (coming soon)

tg907m tg1307m

tc030m

New
Controller for Magnetically Suspended
Turbo Molecular Pump   TC030M (coming soon)

  • Features

  • < New Features >
  • - Enable to maintain setting parameters and operating data
  • - Four serial communication types, RS232C, RS485, Profibus, and DeviceNet, are selectable
  • - Energy saving
  • - Adapting the latest safety standard UL/IEC 61010-1 3rd edition.
  • Applications

  • - Semiconductor production
  • - Electronics gun exhaust, ionization source exhaust
  • - FPD manufacturing
  • -Surface treatment, surface modification
  • - Manufacture of various electronic components
  • - Analysis, testing equipment
  • - Lamp production, optical components production
  • - Accelerating device, radiation facility, nuclear fusion research
  • - Heat treatment
  • - Research and development

View the details of TG907M >>
View the details of TG1307M >>



New
Compact Dry Vacuum Pump  DSP50

DSP50
  • Features

  • Compact, light weight, and portable
    • • Weight saving with non-timing gear structure.
    • • Weight: 9kg
  • Utility improvement
    • • Applicable to many kinds of facility layouts,
           only need power supply to operate
    • • Standard installation of gas ballast function.
    • • Capable of DC24V and AC100V input power types
  • Low vibration, low noise
    • • Noise: ≦53dB(A)
  • Air-cooling
    • • No need for cooling water.
  • Applications

  • SEM, lithography
  • Medical devices
  • Load-lock ⁄ transfer chamber
  • Analysis devices
  • Accelerator, ion source, EB-gun
  • General vacuum industry
  • PVD
  • R&D

View the details of DSP50 >>