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Turbo Molecular Pumps

	Turbo Molecular Pumps (compound rotor)
Diameter of intake	Magnetically Suspended Type (TG－M series)	Magnetically Suspended Type with Integrated Control Unit (kineTiG series)	Grease Lubricated Type (TG－F series)	Oil Lubricated Type (TG series)
65A			TG50F TG70F
100A	TG390M		TG220F TG240F TG350F	TG203
150A	TG420M TG900M		TG450F TG800F	TG553 TG1003
200A	TG1300M		TG1100F TG1400F	TG1303
250A	TG2400M	kineTiG2200M kineTiG3300M	TG2400F TG2410F	TG1810 TG2813
300A	TG3260M			TG3213
350A	TG3460M			TG3413
500A				TG5000 TG5500

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment

Dry Vacuum Pumps

Dry Vacuum Pumps
Air-cooled series	EcopositiV series	Compact series
FR060D	ER100D/ER100DC	DSP250/DSP500

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment

Oil-sealed Rotary Vacuum Pumps

Oil-sealed Rotary Vacuum Pumps
P series	K series	EcopositiV series
P90 P180 P222 P450 P600 P901	K30002	EP450

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment

Liquid-ring Vacuum Pumps

Liquid-ring Vacuum Pumps

W series

W30S W50S W80S W150S/W150AS W310S/W310AS/W310BS W630S/W630AS/W630BS

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment

Roots Vacuum Pumps

Roots Vacuum Pumps
RD series	RA series	R series
RD302 RD600 RD1200 RD1500/RD1510 RD2500/RD2510	RA100	R6002 R12001

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment

Ejectors

Ejectors

Ejectors

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment

Oil Diffusion Pumps

Oil Diffusion Pumps

Oil Diffusion Pumps

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment

Vacuum Systems

Vacuum Systems

Vacuum System Using a Turbo Molecular Pump Vacuum System Using a Dry Vacuum Pump Vacuum System Using an Oil-sealed Rotary Vacuum Pump Vacuum System Using a Liquid-ring Vacuum Pump Vacuum System Using a Roots Vacuum Pump Vacuum System Using an Ejector

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment

Vacuum Equipments

Vacuum Equipments

Vacuum Equipments

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment