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Osaka Vacuum, Ltd.
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Turbo Molecular Pumps

  Turbo Molecular Pumps (compound rotor)
Diameter of intake Magnetically Suspended Type
(TG-M series)
Magnetically Suspended
Type with Integrated Control Unit
(TGkine series)
Grease Lubricated Type
(TG-F series)
Oil Lubricated Type
(TG series)
65A     TG50F
TG60F
TG70F
 
100A TG390M   TG220F
TG240F
TG350F
TG203
150A TG420M
TG900M
TG907M
  TG450F
TG800F
TG553
TG1003
200A TG1300M
TG1307M
  TG1100F
TG1400F

TG1303
250A TG2400M TGkine2200M TG2400F
TG2410F
TG1810
TG2813
300A   TGkine3300M   TG3213
350A   TGkine3400M TGkine4200M   TG3413
450A       TG5000
500A       TG5500

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment


Dry Vacuum Pumps

Dry Vacuum Pumps
Air-cooled series EcopositiV series Compact series
FR060D ER100D⁄ER100DC DSP50⁄DSP250⁄DSP500

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment


Oil-sealed Rotary Vacuum Pumps

Oil-sealed Rotary Vacuum Pumps
P series K series EcopositiV series
P90
P180
P222
P450
P600
P901
K30002 EP450

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment


Liquid-ring Vacuum Pumps

Liquid-ring Vacuum Pumps
W series
W30S
W50S
W80S
W150S/W150AS
W310S/W310AS/W310BS
W630S/W630AS/W630BS

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment


Roots Vacuum Pumps

Roots Vacuum Pumps
RD series RA series R series
RD302
RD600
RD1200
RD1500/RD1510
RD2500/RD2510
RA100 R6002 R12001

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment


Ejectors

Ejectors
Ejectors

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment


Oil Diffusion Pumps

Oil Diffusion Pumps
Oil Diffusion Pumps

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment


Vacuum Systems

Vacuum Systems
Vacuum System Using a Turbo Molecular Pump
Vacuum System Using a Dry Vacuum Pump
Vacuum System Using an Oil-sealed Rotary Vacuum Pump
Vacuum System Using a Liquid-ring Vacuum Pump
Vacuum System Using a Roots Vacuum Pump
Vacuum System Using an Ejector

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment


Vacuum Equipments

Vacuum Equipments
Vacuum Equipments

TMP/ Dry/ Oil/ Liquid/ Roots/ Ejector/ OilDiff/ System/ Equipment


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